Please use Shinkosha’s sapphire substrate for group
III nitride semiconductors such as blue and white LEDs.
Item | φ2 in | φ3 in | φ4 in |
---|---|---|---|
Diameter | 50.8mm | 76.2mm | 100.0mm |
Thickness | ※ | ※ | ※ |
Flatness | <13μm | <15μm | <20μm |
Parallelism | <10μm | <15μm | <20μm |
Orientation-flat length | 16±1mm | 22±2mm | 32±2mm |