SrTiO3 has a typical perovskite structure and it is widely used as a substrate for ferroelectric and superconductor thin films.
Our SrTiO3 substrate has world-leading quality and production volume, and it is made by integrated production system starting from Verneuil crystal growth to the surface polishing.
Nb:SrTiO3 substrate with electrical conductivity and STEP substrates with atomically flat surface are also available. We hope our substrates can help your research.
| Composition | SrTiO3 |
|---|---|
| Crystal system | Cubic |
| Space group | Pm3m (Perovskite) |
| Lattice constant | a=0.3905 nm |
| Melting point | 2080 ℃ |
| Growth method | Verneuil method |
| Density | 5.122 g/cm3(20 ℃) |
| Dielectric constant | 310 (27℃,1 MHz) |
| Thermal expansion coefficient | 11.1×10-6/℃（r.t.～1000℃） |
| Phase transition | 110 K（tetragonal ⇔ cubic） |
| Refractive index | 2.407 (at 589 nm) |
Transmittance of SrTiO3
| SrTiO3 |
Nb(0.05 wt%):SrTiO3 Nb≒0.1 at% |
Nb(0.5 wt%):SrTiO3 Nb≒1.0 at% |
|
|---|---|---|---|
| Purity | >99.98 % | >99.98 % | >99.98 % |
| Resistivity (Ω・cm) | >107 | 7～10×10-2 | 3～7×10-3 |
| Career density (cm-3) | ― | 1～2×1019 | 1～2×1020 |
| Orientation （Tolerance：±0.5°） | (100), (110), (111) | (100), (110), (111) | (100), (110), (111) |
|
Size (Outer size tolerance: ±0.1 mm / Thickness tolerance: ±0.05 mm) |
10×10×0.5t 15×15×0.5t |
10×10×0.5t 15×15×0.5t |
10×10×0.5t 15×15×0.5t |
| Polishing | One-side / Both-side | One-side / Both-side | One-side / Both-side |
| Surface roughness |
Ra≦1.0nm Rmax≦5.0nm |
Ra≦1.0nm Rmax≦5.0nm |
Ra≦1.0nm Rmax≦5.0nm |
| Flatness (λ=632.8 nm) | 10×10×0.5 t :≦λ 15×15×0.5 t : ≦1.5λ |
10×10×0.5 t :≦λ 15×15×0.5 t : ≦1.5λ |
10×10×0.5 t :≦λ 15×15×0.5 t : ≦1.5λ |
| Options | STEP substrate OFF substrate Breakable substrate |
STEP substrate OFF substrate Breakable substrate |
OFF substrate Breakable substrate |
