STEP substrate

STEP substrate has an ultimate precision surface with molecular layer steps and atomically flat terraces which is achieved by etching and annealing after precision polishing.
The STEP substrate is indispensable for high-precision epitaxial growth. We provide single crystal STEP substrates of SrTiO3, Al2O3, TiO2, and LaAlO3.

Features

  • Made by our unique STEP treatment technology
  • High quality crystals grown by accumulated technology for over the years
  • Very flat surface without affected layer by high-precision processing technology
  • High orientation accuracy (tolerance ±0.15°)
  • Precision cleaning and specialized package
  • Delivery with AFM pictures of all items

STEP height, terrace width and OFF angle

Standard specs

Material Crystal system Orientation Size Dopant
Al2O3 Trigonal (0001) 10×10×0.5 t
15×15×0.5 t
SrTiO3 Cubic (100) 10×10×0.5 t
15×15×0.5 t
Nb:0~0.05 wt% (≒0.1 at%)
TiO2 Tetragonal (110), (100) 10×10×0.5 t
15×15×0.5 t
Nb:0~0.5 wt% (≒0.43 at%)
LaAlO3 Pseudo – cubic (100) 10×10×0.5 t
15×15×0.5 t

STEP height

Material Orientation STEP height(nm)
(Theoretical value)
SrTiO3 (100) 0.39
Al2O3 (0001) 0.21
TiO2 (110) 0.32
TiO2 (100) 0.23
LaAlO3 (100) 0.38

OFF angle vs terrace width of SrTiO3(100)

OFF angle(°) Terrace width(nm)
(Theoretical value)
0.10 223
0.15 149
0.20 112
0.25 89
0.30 74
0.50 45
1.00 22

※If you are looking for other specs, please contact us.
※Delivery time (about):
Standard model: 1 week after order
Special model: 1 month or more after order