STEP substrate has an ultimate precision surface with molecular layer steps and atomically flat terraces which is achieved by etching and/or annealing after precision polishing. The STEP substrate is indispensable for high-precision epitaxial growth. We provide single crystal STEP substrates of SrTiO3, Al2O3, TiO2, and LaAlO3.
Features
Made by our unique STEP treatment technology
High quality crystals grown by accumulated technology for over the years
Very flat surface without affected layer by high-precision processing technology
High orientation accuracy (tolerance ±0.3°)
Precision cleaning and specialized package
Delivery with AFM pictures of all items
AFM image of STEP substrate
Specialized case for STEP substrate
STEP height, terrace width and OFF angle
Standard specs
Material
Crystal system
Orientation
Size
Dopant
Al2O3
Trigonal
(0001)
10×10×0.5 t 15×15×0.5 t
―
SrTiO3
Cubic
(100)
10×10×0.5 t 15×15×0.5 t
Nb:0～0.05 wt% (≒0.1 at%)
TiO2
Tetragonal
(110), (100)
10×10×0.5 t 15×15×0.5 t
Nb:0～0.5 wt% (≒0.43 at%)
LaAlO3
Pseudo – cubic
(100)
10×10×0.5 t 15×15×0.5 t
―
STEP height
Material
Orientation
STEP height(nm) (Theoretical value)
SrTiO3
(100)
0.39
Al2O3
(0001)
0.21
TiO2
(110)
0.32
TiO2
(100)
0.23
LaAlO3
(100)
0.38
OFF angle vs terrace width of SrTiO3(100)
OFF angle(°)
Terrace width(nm) (Theoretical value)
0.10
223
0.15
149
0.20
112
0.25
89
0.30
74
0.50
45
1.00
22
※If you are looking for other specs, please contact us.
